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Strain behavior of thin film PbZr0.3Ti0.7O3 (30/70) examined through piezoforce microscopy.

机译:通过压电显微镜检查薄膜PbZr0.3Ti0.7O3(30/70)的应变行为。

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摘要

Using an atomic force microscope (AFM) modified to perform PiezoAFM we haveinvestigated the piezoelectric response of sol-gel thin film lead zirconate titanate (PZT 30/70, PbZr0.3Ti0.7O3) on Pt-Ti/SiO2/Si to a quasi DC electric field. The films were produced by spin coating a PZT 30/70 sol onto a selected substrate and firing at 520ºC. This generated a film that was highly [111] orientated and single phase perovskite. By applying a sinusoidal 2Hz AC waveform between the AFM cantilever and ground we have generated strain-field, or butterfly loops for the PZT film. PiezoAFM butterfly loops show that the localised piezoelectric response for PZT varies depending on the sign of the applied field. The degree of asymmetry in the hysteresis loop has been attributed tocharge trapping at the electrode-PZT interface generating a system that canpreferentially re-pole in one direction. The charge trapped at the interface has anoverwhelming effect on the polarisability of the film. Coercive fields have been calculated from the minimum point of the strain before reversal for the system and are shown to be -30V/μm and +32V/μm in absolute terms and -23V/μm and +39V/μm in terms relative to the charge trapped at the electrode interface. δ33 values obtained for the PZT thin film 2 investigated ranged from 30 to 40pm/V. The maximum strain of the system was shown at applied biases of +/-10V and was 0.3% at a bias of +10V, although at this field the sample was not showing saturated behaviour. By relating the offset of the butterfly loops to the charge density generated by defects at the PZT-electrode interface, calculated tobe 0.025Cm-2, an estimate of the number of defects at the interface has been drawn.The concentration of defects at the interface is 1 defect for every 6nm2 of surface, representing 1 defect for every 40 unit cells or 2.5% of unit cells being defected.
机译:使用经修改以执行PiezoAFM的原子力显微镜(AFM),我们研究了Pt-Ti / SiO2 / Si上的溶胶-凝胶薄膜锆钛酸铅钛酸盐(PZT 30/70,PbZr0.3Ti0.7O3)对准DC的压电响应电场。通过将PZT 30/70溶胶旋涂到选定的基材上并在520ºC下焙烧来生产薄膜。这产生了高度[111]取向和单相钙钛矿的膜。通过在AFM悬臂和地面之间施加正弦2Hz AC波形,我们生成了PZT薄膜的应变场或蝶形环。 PiezoAFM蝶形环路显示,PZT的局部压电响应取决于所施加场的符号而变化。磁滞回线中的不对称度已归因于在电极-PZT界面处的电荷俘获,从而产生了可以优先在一个方向重新极化的系统。界面处捕获的电荷对薄膜的极化性具有压倒性的影响。矫顽场是根据系统反转之前的应变的最小点计算得出的,绝对值显示为-30V /μm和+ 32V /μm,相对于电荷显示为-23V /μm和+ 39V /μm被困在电极界面。研究的PZT薄膜2获得的δ33值为30至40 pm/V。在施加的+/- 10V偏压下显示了系统的最大应变,而在+ 10V的偏压下显示了0.3%的最大应变,尽管在此领域中样品未表现出饱和行为。通过将蝶形环的偏移量与PZT电极界面处的缺陷所产生的电荷密度相关联(计算得出为0.025Cm-2),可以得出界面处缺陷数量的估计值。是每6nm2表面1个缺陷,代表每40个晶胞或2.5%的有缺陷晶胞1个缺陷。

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    Dunn Steve;

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  • 年度 2003
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  • 正文语种 {"code":"en","name":"English","id":9}
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