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Photolithography of Thick Photoresist Coating in Anisotropically Etched V-grooves for Electrically Controlled Liquid Crystal Photonic Bandgap Fiber Devices

机译：用于电控液晶光子带隙纤维装置的各向异性蚀刻V沟槽中厚光致抗蚀剂涂层的光刻法

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摘要

Thick photoresist coating for electrode patterning in anisotropically etched v-grooves is investigated. The photoresist coverage is compared with and without soft baking. Two-step exposure is applied for a complete exposure and minimizing the resolution loss.

机译：研究了用于各向异性刻蚀v型槽中电极构图的厚光致抗蚀剂涂层。比较有无软烘烤的光致抗蚀剂覆盖率。采用两步曝光可实现完整曝光并最大程度地降低分辨率损失。

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作者
Lei Wei; Elena Khomtchenko; Thomas Tanggaard Alkeskjold; Anders Bjarklev;
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年度 2009
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原文格式 PDF
正文语种 eng
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专利

1. Photolithography of thick photoresist coating for electrically controlled liquid crystal photonic bandgap fibre devices [J] . L. Wei, E. Khomtchenko, T.T. Alkeskjold, Electronicsletters . 2009,第6期

机译：电控液晶光子带隙光纤器件厚光刻胶涂层的光刻
2. Continuously tunable all-in-fiber devices based on thermal and electrical control of negative dielectric anisotropy liquid crystal photonic bandgap fibers [J] . Lei Wei, Lars Eskildsen, Johannes Weirich, Applied optics . 2009,第3期

机译：基于负介电各向异性液晶光子带隙光纤的热和电控制的连续可调全光纤设备
3. Electrically controlled broadband liquid crystal photonic bandgap fiber polarimeter [J] . Thomas Tanggaard Alkeskjold, Anders Bjarklev Optics Letters . 2007,第12期

机译：电控宽带液晶光子带隙光纤偏振仪
4. Photolithography of thick photoresist coating in anisotropically etched v-grooves for electrically controlled liquid crystal photonic bandgap fiber devices [C] . Lei Wei, Khomtchenko E., Alkeskjold T.T., Conference on Optical Fiber Communication - incudes post deadline papers, 2009. OFC 2009 . 2009

机译：电控液晶光子带隙光纤器件各向异性刻蚀v形槽中厚光刻胶涂层的光刻
5. Cholesteric liquid crystal photonic crystal lasers and photonic devices [D] . Zhou, Ying 2008

机译：胆甾型液晶光子晶体激光器和光子器件
6. Polymer Stabilized Cholesteric Liquid Crystal Siloxane for Temperature-Responsive Photonic Coatings [O] . Weixin Zhang, Johan Lub, Albertus P.H.J. Schenning, 2020

机译：聚合物稳定的胆甾型液晶硅氧烷用于温度响应光子涂层
7. Photolithography of thick photoresist coating in anisotropically etched V-grooves for electrically controlled liquid crystal photonic bandgap fiber devices [O] . Wei Lei, Khomtchenko Elena, Alkeskjold Thomas Tanggaard, 2009

机译：用于电控制液晶光子带隙光纤器件的各向异性蚀刻V形槽中的厚光刻胶涂层的光刻
8. Avian Nanostructured Tissues as Models for New Defensive Coatings and Photonic Crystal Fibers. [R] . Shawkey, M. D. 2012

机译：禽类纳米结构组织作为新型防御涂层和光子晶体纤维的模型。

Photolithography of Thick Photoresist Coating in Anisotropically Etched V-grooves for Electrically Controlled Liquid Crystal Photonic Bandgap Fiber Devices

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