The Thirty Meter Telescope has 492 primary mirror segments, each incorporated into a Primary Segment Assembly (PSA), each of which in turn has three actuators that control piston, tip, and tilt, for a total of 1476 actuators. Each actuator has a servo loop that controls small motions (nanometers) and large motions (millimeters). Candidate actuators were designed and tested that fall into the categories of "hard" and "soft," depending on the offload spring stiffness relative to the PSA structural stiffness. Dynamics models for each type of actuator are presented, which respectively use piezo-electric transducers and voice coils. Servo design and analysis are presented that include assessments of stability, performance, robustness, and control structure interaction. The analysis is presented for a single PSA on a rigid base, and then using Zernike approximations the analysis is repeated for 492 mirror segments on a flexible mirror cell. Servo requirements include low-frequency stiffness, needed for wind rejection; reduced control structure interaction, specified by a bound on the sensitivity function; and mid-frequency damping, needed to reduce vibration transmission. The last of these requirements, vibration reduction, was found to be an important distinguishing characteristic for actuator selection. Hard actuators have little inherent damping, which is improved using PZT shunt circuits and force feedback, but still these improvements were found to result in less damping than is provided by the soft actuator. Results of the servo analysis were used for an actuator down-select study.
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