The Laboratoire National de Métrologie et d’Essais (LNE) has developed an innovative ultra precision coordinate measuring machine [LAH07] traceable to the national lengthstandard to measure three-dimensional objects with nanometric uncertainties (figure 1). The measuring range is 300 mm x 300 mm x 50 μm. The objective in term ofuncertainty is to reach 30 nm in X and Y directions for a displacement of 300 mm and about few nanometers for a vertical displacement of 50 μm. On this machine, we usefour capacitive sensors to measure the position along z direction. These sensors targetthe flat surface of cylinders (300 mm diameter) used as flatness references. To measure the shape of these aluminum references with nanometric uncertainties, wepropose a measurement method based on a propagation process in which we introduce an angular measurement to compensate the curvature error inherent in this method.The measurement process uses the same sensor technology (capacitive sensor) we use on the machine. This paper presents the measurement method, its validation and the first results.
展开▼
机译：国家实验室（LNE）开发了一种创新的超精密坐标测量机[LAH07]，可溯源至国家长度标准，以测量具有纳米不确定性的三维物体（图1）。测量范围是300 mm x 300 mm x 50μm。就不确定性而言，目标是在X和Y方向上达到300 nm的位移为300 mm，而在垂直方向上位移为50 nm则达到几纳米。在这台机器上，我们使用四个电容传感器测量沿z方向的位置。这些传感器瞄准用作平面度基准的圆柱体（直径300 mm）的平面。为了测量具有铝纳米不确定度的这些铝参考物的形状，我们提出了一种基于传播过程的测量方法，其中引入了角度测量以补偿该方法固有的曲率误差。该测量过程使用相同的传感器技术（电容传感器）我们在机器上使用。本文介绍了测量方法，其验证和初步结果。
展开▼
