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Deep UV hardening of photoresist for shaping of graphene and lift-off fabrication of back-gated field effect biosensors by ion-milling and sputter deposition

机译：用于光刻胶成型的光致抗蚀剂的深紫外硬化，以及通过离子铣削和溅射沉积剥离制备背栅场效应生物传感器

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publisher: Elsevier articletitle: Deep UV hardening of photoresist for shaping of graphene and lift-off fabrication of back-gated field effect biosensors by ion-milling and sputter deposition journaltitle: Carbon articlelink: http://dx.doi.org/10.1016/j.carbon.2017.03.032 content_type: article copyright: © 2017 The Authors. Published by Elsevier Ltd.

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Li B; Pan G; Suhail A; Islam K; Avent N; Davey P;
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年度 2017
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1. Scalable Production of High-Sensitivity, Label-Free DNA Biosensors Based on Back-Gated Graphene Field Effect Transistors [J] . Ping Jinglei, Vishnubhotla Ramya, Vrudhula Amey, ACS nano . 2016,第9期

机译：基于背栅石墨烯场效应晶体管的高灵敏度，无标记DNA生物传感器的可扩展生产
2. Fabrication of multi-electrode array platforms for neuronal interfacing with bi-layer lift-off resist sputter deposition [J] . Yong Hee Kim, Gook Hwa Kim, Nam Seob Baek, Journal of Micromechanics and Microengineering . 2013,第9期

机译：用于多层剥离抗蚀剂溅射沉积的神经元接口的多电极阵列平台的制造
3. Fabrication of High-Performance Ultrathin In2O3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography [J] . Kim Jaemyung, Rim You Seung, Chen Huajun, ACS nano . 2015,第4期

机译：化学剥离光刻技术制备高性能超薄In2O3薄膜场效应晶体管和生物传感器
4. DNA/AuNP-Graphene Back-gated Field Effect Transistor as a Biosensor for Lead (II) Ion Detection [C] . Ling Hoe Chee, Pradeep Kumar, Chun Hong Kang, IEEE Regional Symposium on Micro and Nanoelectronics . 2017

机译：DNA / AUNP-石墨烯背门效应晶体管作为铅（II）离子检测的生物传感器
5. ScalableProduction of High-Sensitivity Label-FreeDNA Biosensors Based on Back-Gated Graphene Field Effect Transistors [O] . Jinglei Ping, §, Ramya Vishnubhotla, -1

机译：可扩展高灵敏度无标签生产基于背栅石墨烯场效应晶体管的DNA生物传感器
6. Scalable production of high sensitivity, label-free DNA biosensors based on back-gated graphene field-effect transistors [O] . Ping, Jinglei, Vishnubhotla, Ramya, Vrudhula, Amey, 2017

机译：可扩展生产高灵敏度，无标记的DNa生物传感器在背栅式石墨烯场效应晶体管上
7. Property Investigation and Sputter Deposition of Dispersion-Hardened Copper for Fatigue Specimen Fabrication [R] . Mcclanahan, E. D., Busch, R., Moss, R. W. 1973

机译：用于疲劳试样制造的分散硬化铜的性能研究和溅射沉积

Deep UV hardening of photoresist for shaping of graphene and lift-off fabrication of back-gated field effect biosensors by ion-milling and sputter deposition

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