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Hybrid organic-inorganic sol-gel materials and components for integrated optoelectronics

机译：集成光电子学的混合有机-无机溶胶-凝胶材料和组件

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摘要

On the technical platform of hybrid organic-inorganic sol-gel, the integrated optoelectronics in the forms of heterogeneous integration between the hybrid sol-gel waveguide and the high refractive index semiconductors and the nonlinear functional doping of disperse red chromophore into hybrid sol-gel is developed. The structure of hybrid sol-gel waveguide on high index semiconductor substrate is designed with BPM-CAD software. A hybrid sol-gel based on MAPTMS and TEOS suitable for lower cladding for the waveguide is developed. The multi-layer hybrid sol-gel waveguide with good mode confinement and low polarization dependence is fabricated on Si and InP. As proof of concept, a 1 x 12 beam splitter based on multimode interference is fabricated on silicon substrate. The device shows excess loss below 0.65 dB and imbalance below 0.28 dB for both TE and TM polarization. A nonlinear active hybrid sol-gel doped with disperse red 13 has been developed by simple co-solvent method. It permits high loading concentration and has low optical loss at 1550 nm. The second-order nonlinear property of the active sol-gel is induced with corona poling and studied with second harmonic generation. A 3-fold of enhancement in the poling efficiency is achieved by blue light assisted corona poling. The chromophore alignment stability is improved by reducing the free volume of the formed inorganic network from the sol-gel condensation reaction. An active sol-gel channel waveguide has been fabricated using active and passive hybrid sol-gel materials by only photopatterning and spin-coating. An amplitude modulator based on the active sol-gel containing 30 wt.% of DR13 shows an electro-optic coefficient of 14 pm/V at 1550 nm and stable operation within the observation time of 24 days.
机译：在混合有机-无机溶胶-凝胶技术平台上，以混合溶胶-凝胶波导与高折射率半导体之间的异质集成形式以及将红色发色团分散到混合溶胶-凝胶中的非线性功能性掺杂的形式集成了光电子学。发达。利用BPM-CAD软件设计了高折射率半导体衬底上的混合溶胶-凝胶波导结构。开发了适用于波导下部包层的基于MAPTMS和TEOS的混合溶胶凝胶。在Si和InP上制造了具有良好的模式限制和低偏振依赖性的多层混合溶胶-凝胶波导。作为概念验证，在硅基板上制造了基于多模干涉的1 x 12分束器。对于TE和TM偏振，该器件显示出低于0.65 dB的过大损耗和低于0.28 dB的不平衡。通过简单的共溶剂法开发了一种掺有分散红13的非线性活性杂化溶胶-凝胶。它允许高负载浓度，在1550 nm处的光损耗低。活性溶胶凝胶的二阶非线性性质是通过电晕极化诱导的，并通过二次谐波的产生进行研究。蓝光辅助电晕极化使极化效率提高了3倍。通过减少由溶胶-凝胶缩合反应形成的无机网络的自由体积，可以改善发色团的排列稳定性。仅通过光图案化和旋涂，使用有源和无源混合溶胶-凝胶材料制造了有源溶胶-凝胶通道波导。基于包含30 wt。％DR13的活性溶胶凝胶的调幅器在1550 nm处的电光系数为14 pm / V，并且在24天的观察时间内稳定运行。

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    Lu Dong;

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  • 年度 2004
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