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ELEKTROMECHANISCHES MIKROSYSTEM, DAS EIN AKTIVES ELEMENT MIT EINER STUKTURIERTEN KERNSCHICHT UMFASST
ELEKTROMECHANISCHES MIKROSYSTEM, DAS EIN AKTIVES ELEMENT MIT EINER STUKTURIERTEN KERNSCHICHT UMFASST
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摘要
The invention relates to an electromechanical microsystem (100) provided with an active element (200), the active element (200) comprises an active layer (210), a core layer (220) and a retaining layer (230), the active layer (210) being adapted to, under the effect of a first electrical signal, pass into a mechanically constrained state, advantageously a state of compression, intended to generate a bending of the active element (200) in a direction perpendicular to the front face, and conversely, the active layer (210), the core layer (220) and the retaining layer (230) are arranged so that the neutral fiber (240), associated with zero elongation in the event of bending of the active element (200), is located in the volume of the core layer (220) or of the retaining layer (230), the core layer (220) comprises at least 20% of recesses (221).
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