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ÉLÉMENT EN CONTACT AVEC UN LIQUIDE CHIMIQUE POUR LA FABRICATION D'UN PRODUIT SEMI-CONDUCTEUR LORSQU'UN LIQUIDE CHIMIQUE EST AMENÉ À S'ÉCOULER
ÉLÉMENT EN CONTACT AVEC UN LIQUIDE CHIMIQUE POUR LA FABRICATION D'UN PRODUIT SEMI-CONDUCTEUR LORSQU'UN LIQUIDE CHIMIQUE EST AMENÉ À S'ÉCOULER
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摘要
The purpose of the present invention is to provide: a member which contacts liquid, gas, or powder insulating material when the insulating material is caused to flow and which is less susceptible to dielectric breakdown; a distribution mechanism, tank, and device using a sheet for lining the member or the inside of a pipe or a tank containing the member; a storage tank wherein a portion of the surface of a liquid-contact portion thereof comprises the member; a storage method for storing organic solvent, ultrapure water, and hydrogen peroxide water, particularly organic solvent, ultrapure water, and hydrogen peroxide water used in semiconductor product manufacture, using the storage tanks; and a method for manufacturing a semiconductor product using the organic solvent stored in the storage tank. A resin composition containing a matrix resin and an electro-conductive material dispersed in the matrix resin is used for the member which contacts liquid, gas, or powder insulating material when the insulating material is caused to flow.
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