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HALBLEITERSTRUKTUR MIT GESPANNT AUFGEHÄNGTER MEMBRAN, DIE EINEN OPTISCHEN HOHLRAUM ENTHÄLT
HALBLEITERSTRUKTUR MIT GESPANNT AUFGEHÄNGTER MEMBRAN, DIE EINEN OPTISCHEN HOHLRAUM ENTHÄLT
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摘要
The invention relates to a semiconductor structure comprising:a semiconductor layer (10), comprising a membrane suspended above a support layer (2), the suspended membrane being formed of a central portion (20) stressed in tension, and of several tensioning arms (30),at least one optical cavity, delimited by two optical reflectors (40), arranged in the lateral portions (30) on either side of the central portion (20);characterized in thatthe central portion (20) is adapted to transmit in the direction of the optical reflectors (40) at least one odd order mode (TE01; TM01);each of said optical reflectors (40) is formed of two lateral half-reflectors (41) arranged on either side of a longitudinal axis (") of the lateral portion (30), so as to reflect at least partially said odd order mode (TE01; TM01).
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