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METHOD FOR FORMING A CHEMICAL GUIDING STRUCTURE ON A SUBSTRATE AND CHEMO-EPITAXY METHOD

机译:在基质上形成化学指导结构的方法和化学表观方法

摘要

The invention relates to a method of forming a chemical guide structure intended for the self-assembly of a block copolymer by chemo-epitaxy, this method comprising the following steps: - forming on at least one substrate (100) an initial unit (210) of a first grafted polymer material having a first molar mass and a first chemical affinity with respect to the block copolymer; covering the initial pattern (210) and a region of the substrate adjacent to the initial pattern with a layer (150) comprising a second graftable polymeric material (160), the second polymeric material having a second molar mass, greater than the first molar mass , and a second chemical affinity with respect to the block copolymer, different from the first chemical affinity; and - grafting the second polymeric material (160) in the region adjacent to the initial pattern (210).
机译:本发明涉及一种形成化学引导结构的方法,该化学引导结构旨在通过化学外延自组装嵌段共聚物,该方法包括以下步骤:-在至少一个基板(100)上形成初始单元(210)。相对于嵌段共聚物具有第一摩尔质量和第一化学亲和力的第一接枝聚合物材料;用包含第二可接枝聚合物材料(160)的层(150)覆盖初始图案(210)和基底的与初始图案相邻的区域,第二聚合物材料的第二摩尔质量大于第一摩尔质量以及相对于嵌段共聚物的第二化学亲和力,不同于第一化学亲和力; -在邻近初始图案(210)的区域中接枝第二聚合物材料(160)。

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