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METHOD FOR FORMING A CHEMICAL GUIDING STRUCTURE ON A SUBSTRATE AND CHEMO-EPITAXY METHOD
METHOD FOR FORMING A CHEMICAL GUIDING STRUCTURE ON A SUBSTRATE AND CHEMO-EPITAXY METHOD
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机译:在基质上形成化学指导结构的方法和化学表观方法
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摘要
The invention relates to a method of forming a chemical guide structure intended for the self-assembly of a block copolymer by chemo-epitaxy, this method comprising the following steps: - forming on at least one substrate (100) an initial unit (210) of a first grafted polymer material having a first molar mass and a first chemical affinity with respect to the block copolymer; covering the initial pattern (210) and a region of the substrate adjacent to the initial pattern with a layer (150) comprising a second graftable polymeric material (160), the second polymeric material having a second molar mass, greater than the first molar mass , and a second chemical affinity with respect to the block copolymer, different from the first chemical affinity; and - grafting the second polymeric material (160) in the region adjacent to the initial pattern (210).
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