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PARTICLE-FREE METHOD FOR SIGNIFICANTLY REDUCING THE SURFACE WEIGHT OF TUBE, CAPILLARY AND HOLLOW FIBERS FROM SILICA, HIGHLY GLASSES AND OPTICAL GLASSES, AND CLEANING CAVITY SURFACES OF TUBE, CAPILLARY AND HOLLOWING BASES FROM SILICATING GLASS OR OPTICAL GLASSES HIGHLY SILENCED
PARTICLE-FREE METHOD FOR SIGNIFICANTLY REDUCING THE SURFACE WEIGHT OF TUBE, CAPILLARY AND HOLLOW FIBERS FROM SILICA, HIGHLY GLASSES AND OPTICAL GLASSES, AND CLEANING CAVITY SURFACES OF TUBE, CAPILLARY AND HOLLOWING BASES FROM SILICATING GLASS OR OPTICAL GLASSES HIGHLY SILENCED
The invention relates to a particle-free process for significantly reducing the surface roughness of the inner surface of tubes, capillaries, hollow fibers or cavities of silica glass or high-silica glassy glasses and an apparatus for carrying out this process. The object of the present invention is a particle-free process for significantly reducing the surface roughness To specify the inner surface of tubes, capillaries, hollow fibers or cavities made of silica glass or high-silica glasses, which produces high-quality surfaces inside the hollow fibers, is achieved by carrying out a process as follows: - Generation of microwaves in a high-frequency microwave source ( 3) with an energy in the range of 400 W to 6000 W, - guiding these microwaves in a tapered waveguide (4), wherein the microwaves from the waveguide (4) through the wall (12) of the tube, the capillary, hollow fiber (1) or Cavity (2), which is microwave transparent, into the discharge zone (14) inside the tube, the capillary, hollow fiber (1) or cavity (2) are guided, which is designed as a cavity (13), - introducing a process gas in the tube, the capillary, hollow fiber (1) or cavity (2), which / s a gas inlet opening (5) and a gas outlet opening (6), at a pressure p ≧ 1 bar, wherein the process gas through the gas inlet opening (6) so into the tube, the capillary, hollow fiber (1) or cavity (2) is introduced, that it has a tangential flow component (63), - turning (64) of the tube, the capillary, hollow fiber (1) or cavity (2), - Generation of a plasma (65) in the tube, the capillary, hollow fiber (1) or cavity (2) by means of electrodeless ignition of the process gas and microwave-induced gas discharge axially in the tube, the capillary, hollow fiber (1) or cavity 2) along the Longitudinal axis -AA-.
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