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MANUAL VALVE DEVICE FOR VACUUM PIPING IN SEMICONDUCTOR MANUFACTURING FACILITIES
MANUAL VALVE DEVICE FOR VACUUM PIPING IN SEMICONDUCTOR MANUFACTURING FACILITIES
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机译：半导体制造工厂中用于真空管道的手动阀装置
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摘要
According to an embodiment of the present invention, a manual valve device for a vacuum piping in semiconductor manufacturing facilities comprises: a valve body (10) with a boss (16) formed on a side surface; a scale bracket (20) configured to be fixedly installed on the boss (16); a shaft (30) configured to be installed to be rotatable on the boss (16) and to have a first key part (32) formed on one side and processed in a direction parallel to an axis line (L); a throttle disk (40) configured to be installed on the shaft (30) to open and close the inside of the valve body (10) according to a posture change of the shaft (30); a lever (50) configured to be installed on the outside of the shaft (30), to have a second key part (52) formed on one side at a position corresponding to the first key part (32), to be in contact with the first key part (32) and the second key part (52) to rotate together with the shaft (30), to linearly move on the shaft along an axis line (L) of the shaft (30), and to have a grip part (56) by cutting a part (57) of a round shape; and a locking device (60) configured to hold the adjusted position of the lever (50).;COPYRIGHT KIPO 2020
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