The present invention relates to a dual-structure 3-axis MEMS acceleration sensor, comprising: a first mass part that moves according to the movement of the x-axis or y-axis, a first spring part connecting the first mass part to a predetermined fixed position, and the first A second mass unit installed in a space formed in the center of the mass unit and moving according to the movement of the z-axis, a second spring unit connecting the second mass unit to the first mass unit, and a z-direction movement under the second mass unit Characterized in that it includes a z-direction sensing electrode for sensing, and it is possible to improve z-axis sensitivity while reducing the size compared to the conventional acceleration sensor.
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