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Ferromagnetic Resonance (FMR) electrical test device for spintronic devices
Ferromagnetic Resonance (FMR) electrical test device for spintronic devices
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机译：自旋电子设备的铁磁共振（FMR）电测试设备
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摘要
A scanning ferromagnetic resonance (FMR) measurement system is disclosed having one or two magnetic poles and radio frequency (RF) probes mounted on a holder plate and enabling a magnetic field or a planar magnetic field, respectively, perpendicular to the plane in a test position. While the RF probe tip is in contact with the magnetic film over the entire Wafer Under Test (WUT), a plurality of microwave frequencies f R are sequentially transmitted through the probe tip. At the same time, a magnetic field (H R ) is applied to the contacted region to induce an FMR condition in the magnetic film for each pair of (H R , f R ) values. The RF output signal is transmitted through the magnetic film or reflected from the magnetic film to an RF diode and converted into a voltage signal that the controller uses to determine the effective anisotropic field, line width, damping factor, and/or non-uniform expansion for areas less than 1 mm. . The WUT is moved to a pre-programmed position, allowing multiple FMR measurements at each test position.
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机译：公开了一种扫描铁磁共振（FMR）测量系统，该系统具有一个或两个磁极和射频（RF）探针，该探针安装在固定板上，并且能够在测试位置中分别垂直于该平面而产生磁场或平面磁场。当RF探针尖端在整个被测晶圆（WUT）上与磁性膜接触时，多个微波频率f R 依次通过探针尖端传输。同时，对接触区域施加磁场（H R ），以在每对（H R ，f R ）值。 RF输出信号通过磁性膜传输或从磁性膜反射到RF二极管，并转换为电压信号，控制器使用该信号来确定有效的各向异性场，线宽，阻尼系数和/或不均匀膨胀对于小于1毫米的区域。 。 WUT移至预编程位置，从而允许在每个测试位置进行多次FMR测量。
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