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flushing system for TiCl4 refining apparatus using refined TiCl4
flushing system for TiCl4 refining apparatus using refined TiCl4
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机译:使用精制TiCl4的TiCl4精制设备的冲洗系统
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摘要
The present invention relates to a flushing system of a titanium tetrachloride (TiCl4) high-purity purification device using a self-produced process fluid, and when a problem such as clogging occurs in a specific area of a pipe of a purification device or repair work of a specific equipment is required This is to allow maintenance work while operating normally without stopping the purification device. In particular, by using the self-produced process fluid, there is no problem in equipment and it is convenient to manage.
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