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DHM DHM Digital Holography MicroscopeDHM and inspecting method and semiconductor fabricating method using the DHM
DHM DHM Digital Holography MicroscopeDHM and inspecting method and semiconductor fabricating method using the DHM
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机译：DHM DHM数字全息显微镜DHM以及使用DHM的检查方法和半导体制造方法
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摘要
A technical idea of the present invention provides a low-cost DHM capable of performing inspection at a high speed while precisely inspecting an inspection object at high resolution, an inspection method using the DHM, and a manufacturing method of a semiconductor device. The DHM comprises a light source configured to generate and output a light, a beam splitter configured to incident the light to the inspection object and to output the reflected light from the inspection object, and a detector configured so as to detect the reflected light; and the detector generates a hologram of the interference light if the reflected light includes the interference light, and there is no lens on a path from the light source to the detector.
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