首页> 外国专利> METHODS OF GENERATING DROP PATTERNS, SYSTEMS FOR SHAPING FILMS WITH THE DROP PATTERN, AND METHODS OF MANUFACTURING AN ARTICLE WITH THE DROP PATTERN

METHODS OF GENERATING DROP PATTERNS, SYSTEMS FOR SHAPING FILMS WITH THE DROP PATTERN, AND METHODS OF MANUFACTURING AN ARTICLE WITH THE DROP PATTERN

机译：产生落差模式的方法，使用落差模式来塑造电影的系统以及使用落差模式来制造物品的方法

页面导航

摘要
著录项
相似文献

摘要

One embodiment is a method that includes generating drop pattern information. The method may comprise receiving pattern information. The pattern information may include one or both of: a substrate pattern of a representative substrate; and a template pattern of a representative template. The method may further comprise receiving offset information about a particular substrate that is representative of a measured state of the particular substrate relative to a reference state. The drop pattern information may represent a plurality of positions to place droplets of formable material on the particular substrate. The method may further comprise outputting the drop pattern information that is representative of the formable material that fills a volume between the template and the particular substrate that is in the measured state and the formable material does not spread into a border region at an edge of the particular substrate.

机译：一个实施例是一种包括生成墨滴样式信息的方法。该方法可以包括接收模式信息。图案信息可以包括以下之一或两者：代表性基板的基板图案;以及和代表性模板的模板模式。该方法可以进一步包括：接收关于特定衬底的偏移信息，该偏移信息代表特定衬底相对于参考状态的测量状态。液滴图案信息可表示将可成形材料的液滴放置在特定基板上的多个位置。该方法可以进一步包括输出代表可成形材料的液滴图案信息，该可成形材料填充模板和处于测量状态的特定基板之间的体积，并且可成形材料不扩散到容器边缘处的边界区域中。特定基材。

著录项

公开/公告号WO2020185317A1

专利类型
公开/公告日2020-09-17

原文格式PDF
申请/专利权人 CANON KABUSHIKI KAISHA;CANON NANOTECHNOLOGIES INC.;
展开▼

申请/专利号WO2020US15549
发明设计人 SIMPSON LOGAN L.;BURNS STEVEN WAYNE;BATTIN JASON;KHUSNATDINOV NIYAZ;JONES CHRISTOPHER ELLIS;CONE CRAIG WILLIAM;ZHANG WEI;IRVING JAMES W.;
展开▼

申请日2020-01-29
分类号B29C59/02;B82Y10;B82Y40;G03F7/004;
国家 WO
入库时间 2022-08-21 11:09:27

相似文献

专利
外文文献
中文文献