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MICROSPECTROSCOPY DEVICE, AND MICROSPECTROSCOPY METHOD
MICROSPECTROSCOPY DEVICE, AND MICROSPECTROSCOPY METHOD
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机译：显微检查装置和显微检查方法
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摘要
This microspectroscopy device is provided with: a first light source having a variable wavelength, for emitting pump light in a mid-infrared light wavelength region; a second light source for emitting probe light in the visible range; a light source control unit for varying the wavelength of the infrared light source; a first optical system for combining the the pump light and the probe light, and condensing the same on a minute part of a specimen; a second optical system for blocking at least the probe light from transmitted light or reflected light from the specimen; a detector onto which the light from the second optical system is incident, and which detects the incident light; a first spectrum acquiring means for acquiring the spectrum of the incident light, as a Raman spectrum or a fluorescence spectrum of the specimen, when the probe light is radiated onto the specimen; and a second spectrum acquiring means for acquiring an infrared absorption spectrum of the specimen, on the basis of a change in the spectrum of the incident light with respect to a change in the wavelength effected by the light source control unit, when the probe light and the pump light are radiated onto the specimen.
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