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FLEXIBLE PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND FORMING METHOD THEREFOR, AND FLEXIBLE PMUT ARRAY AND FORMING METHOD THEREFOR
FLEXIBLE PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND FORMING METHOD THEREFOR, AND FLEXIBLE PMUT ARRAY AND FORMING METHOD THEREFOR
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机译：柔性压电微超声换能器（PMUT）及其形成方法，以及柔性PMUT阵列及其形成方法
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摘要
A flexible piezoelectric micromachined ultrasonic transducer (PMUT), comprising: a flexible substrate (115) and a PMUT four-layer structure (110). The flexible substrate (115) has a cavity (116) at the top, and the depth of the cavity (116) is less than or equal to the thickness of the flexible substrate (115); the PMUT four-layer structure (110) is located on the flexible substrate (115), and the PMUT four-layer structure (110) comprises at least a lower electrode (113), a piezoelectric layer (112), and an upper electrode (111). The flexible PMUT comprises the flexible substrate (115), has good flexibility, and can be widely applied. Also provided are a flexible PMUT array, a forming method for the flexible PMUT, and a forming method for the flexible PMUT array.
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