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Method of and arrangement for mapping structural features on a surface of a sample by scanning probe microscopy.
Method of and arrangement for mapping structural features on a surface of a sample by scanning probe microscopy.
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机译：通过扫描探针显微镜在样品表面上绘制结构特征的方法和装置。
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摘要
The present document relates to a method of mapping structural features on a surface of a sample using a scanning probe microscopy device comprising a sample support structure for supporting the sample, a scan head including a probe comprising a cantilever and a probe tip arranged on the cantilever, and an actuator for moving the probe tip relative to the sample surface for performing the mapping. The method comprises scanning the probe tip relative to the sample surface in a measurement area, wherein the probing tip is brought in contact With the sample; and determining, at least one of: a position of the probe tip relative to the surface in a direction perpendicular thereto, or an orientation of the probe tip relative to the surface. Prior to scanning, the method comprises applying a cover material to at least the measurement area to form a cover layer having a flat surface, and hardening the cover layer. The document further relates to a scanning probe microscopy arrangement.
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