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Mass Flow Sensor, Mass Flow Meter Including the Mass Flow Sensor, and Mass Flow Controller Including the Mass Flow Sensor
Mass Flow Sensor, Mass Flow Meter Including the Mass Flow Sensor, and Mass Flow Controller Including the Mass Flow Sensor
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机译：质量流量传感器，包括质量流量传感器的质量流量计以及包括质量流量传感器的质量流量控制器
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摘要
A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.
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