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SEMICONDUCTOR PACKAGE WITH SEALED THERMAL INTERFACE CAVITY WITH LOW THERMAL RESISTANCE LIQUID THERMAL INTERFACE MATERIAL
SEMICONDUCTOR PACKAGE WITH SEALED THERMAL INTERFACE CAVITY WITH LOW THERMAL RESISTANCE LIQUID THERMAL INTERFACE MATERIAL
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机译:具有低热阻液体液体热界面材料的热界面密封腔的半导体封装
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摘要
A package is disclosed. The package includes a substrate, a die on the substrate, an integrated heat spreader on the substrate that encloses the die, the integrated heat spreader including a hole that extends through the integrated heat spreader, an air permeable adhesive contacting the integrated heat spreader and forming a cavity underneath the integrated heat spreader, and a liquid metal thermal interface material filling the cavity. A sealant plugs the hole that extends through the integrated heat spreader.
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