首页> 外国专利> HALFWAY CUTTER CHANGING METHOD FOR LARGE-AREA MICROSTRUCTURE CUTTING BASED ON IN-SITUATION FILM THICKNESS MEASUREMENT

HALFWAY CUTTER CHANGING METHOD FOR LARGE-AREA MICROSTRUCTURE CUTTING BASED ON IN-SITUATION FILM THICKNESS MEASUREMENT

机译：基于原位膜厚测量的大面积显微组织切割的半切线方法

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摘要

The present invention demonstrates a halfway cutter changing method for large-area microstructure cutting based on in-situation film thickness measurement, including the following steps: step 110: preparatory work; step 120: workpiece preliminary machining; step 130: transparent film coating; step 140: film thickness detection; step 150: halfway cutter changing; and step 160: machining completion. The halfway cutter changing method for the large-area microstructure cutting based on the in-situation film thickness measurement provided by the present invention implements machining of a microstructure with large area, high quality and high uniformity.

机译：本发明展示了一种基于原位膜厚测量的大面积显微组织切割中途刀具更换方法，包括以下步骤：步骤 110 ：准备工作;步骤 120 ：工件预加工;步骤 130 ：透明薄膜涂层;步骤 140 ：膜厚检测;步骤 150 ：中途切刀更换;步骤 160 ：加工完成。本发明提供的基于原位膜厚测量的大面积微结构切割中途刀具更换方法，实现了大面积，高质量，高均匀度的微结构加工。 展开▼

著录项

公开/公告号US2020023441A1

专利类型

公开/公告日2020-01-23

原文格式PDF

申请/专利权人 BEIJING INSTITUTE OF TECHNOLOGY;
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申请/专利号US201916499647

发明设计人 TIANFENG ZHOU;BENSHUAI RUAN;JIA ZHOU;LONGLONG TANG;ZHIQIANG LIANG;LI JIAO;ZHIBING LIU;LIJING XIE;PEI YA N;XIBIN WANG;
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申请日2019-02-18

分类号B23B1;G01B11/06;

国家 US

入库时间 2022-08-21 11:22:31

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1. 一种基于在位膜厚测量的大面积微结构切削中途换刀方法 [P] . 中国专利： CN108381258B . 2019.05.21

2. 一种基于在位膜厚测量的大面积微结构切削中途换刀方法 [P] . 中国专利： CN108381258A . 2018-08-10

3. METHOD EMPLOYING IN-SITU FILM THICKNESS MEASUREMENT TO PERFORM CUTTER REPLACEMENT DURING LARGE AREA MICROSTRUCTURE CUTTING [P] . 世界知识产权组织专利： WO2019165903A1 . 2019-09-06

机译：在大面积显微组织切割过程中采用原位膜厚测量方法进行切刀更换的方法

4. FILM THICKNESS MEASUREMENT METHOD, MEASUREMENT DEVICE, FILM THICKNESS CHANGE MEASUREMENT METHOD AND MEASUREMENT DEVICE [P] . 日本专利： JP2013205252A . 2013-10-07

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5. FILM THICKNESS MEASUREMENT DEVICE, FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT PROGRAM, AND RECORDING MEDIUM FOR RECORDING FILM THICKNESS MEASUREMENT PROGRAM [P] . US2021080250A1 . 2021-03-18

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