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Texture inducing structure for alloy films and texture inducing method thereof
Texture inducing structure for alloy films and texture inducing method thereof
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机译：合金膜的纹理诱导结构及其纹理诱导方法
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摘要
A texture inducing structure for alloy films is provided. The texture inducing structure includes a substrate, a texture-inducing layer and a deposition layer. The texture-inducing layer is formed on the substrate. The texture-inducing layer has an intrinsically strong crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 μm to 6 μm. The deposition layer is formed on the texture-inducing layer. A texture of the deposition layer is induced by the texture-inducing layer thereby changing the magnetic anisotropy and the magnetic strength of the deposition layer, a thickness of the deposition layer is ranged from 1 μm˜60 μm, and the thickness of the deposition layer is greater than that of the texture-inducing layer.
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