首页> 外国专利> Spectrally-resolved three-dimensional shape measurement device and spectrally-resolved three-dimensional shape measurement method

Spectrally-resolved three-dimensional shape measurement device and spectrally-resolved three-dimensional shape measurement method

机译:光谱分辨三维形状测量装置和光谱分辨三维形状测量方法

摘要

An apparatus includes: an interferometer configured to produce white light fringes with measuring light reflected or scattered by an object; an image sensor configured to generate an image signal for each pixel; and a controller. The interferometer splits the measuring light into two luminous fluxes and reflects them on reflecting mirrors having different curvatures. A white light fringe signal is obtained by varying the optical path difference between the two luminous fluxes. The controller is configured to perform frequency conversion on the white light fringe signal, with respect to the optical path difference, to determine a cross spectral density representing spectral information of each point on the object. The controller is configured to perform back-propagation computation based on Fresnel diffraction integral on the cross spectral density to determine a wavefront of light from each point on the object.
机译:一种设备,包括:干涉仪,被配置为产生白光条纹,所述白光条纹具有被物体反射或散射的测量光;以及图像传感器,被配置为为每个像素生成图像信号;和一个控制器。干涉仪将测量光分成两个光束,并在曲率不同的反射镜上反射它们。通过改变两个光束之间的光程差获得白光条纹信号。控制器被配置为相对于光程差对白光条纹信号执行频率转换,以确定代表物体上每个点的光谱信息的交叉光谱密度。控制器被配置为基于交叉光谱密度上的菲涅耳衍射积分执行反向传播计算,以确定来自物体上每个点的光的波阵面。

著录项

  • 公开/公告号US10638062B1

    专利类型

  • 公开/公告日2020-04-28

    原文格式PDF

  • 申请/专利权人 SHIMADZU CORPORATION;

    申请/专利号US201816203882

  • 发明设计人 KYU YOSHIMORI;

    申请日2018-11-29

  • 分类号H04N5/341;G01B9/02;G02B27/14;G01B11/24;

  • 国家 US

  • 入库时间 2022-08-21 11:27:43

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