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Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
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机译：热质量流量测量方法，使用所述方法的热质量流量计以及使用所述热质量流量计的热质量流量控制器
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摘要
By supplying a pulse signal to sensor wires to make the sensor wires generate heat, instead of applying DC electric voltage to the sensor wires, an amount of energy supplied to the sensor wires is decreased while maintaining a signal intensity supplied to the sensor wires, or the signal intensity supplied to the sensor wires is increased while maintaining the amount of energy supplied to the sensor wires. Thereby, a method for measuring a mass flow rate by a thermal type mass flow meter, which can reduce heat generation from the sensor wires while suppressing decrease in measurement accuracy, or can improve measurement accuracy while suppressing increase in heat generation from the sensor wires, is provided.
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