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Method for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift
Method for measuring a height map of multiple fields of view and combining them to a composite height map with minimized sensitivity to instrument drift
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机译：测量多个视场的高度图并将其组合为对仪器漂移的敏感度最小的合成高度图的方法
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摘要
A method for measuring a height map of multiple fields of view on a surface of a substrate with an optical profilometer and combining them to a composite height map, the method includes: moving the profilometer relative to the surface from field to field along a route; measuring height maps of fields on the surface along the route with the profilometer; and, combining a plurality of height maps of measured fields by normalizing said height maps to each other to produce a composite height map of the surface; wherein the route is configured to minimize sensitivity to height drifting of the profilometer during combining a plurality of the height maps.
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