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MEMS gyroscope with improved rejection of a quadrature error

机译：具有改善的正交误差抑制能力的MEMS陀螺仪

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摘要

A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.
机译：一种MEMS陀螺仪，其配备有：至少一个第一弹性块，其通过弹性悬挂元件从基板的顶部悬挂下来，该弹性悬挂元件与刚性固定在基板上的锚定点连接，以致于沿沿着轴线的致动运动被致动。响应于绕水平面的第二轴（垂直于第一轴）作用的第一角速度，沿垂直于水平面的垂直轴执行测量运动。弹性悬架元件被构造成使得内部补偿源自于致动运动的沿着竖直轴线从水平面向外的不期望的位移，使得活动质量在致动运动期间保持在水平面中。

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