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Electron beam diameter control method and electron beam diameter control device for electron beam inspection / length measurement device, and electron beam inspection / length measurement device
Electron beam diameter control method and electron beam diameter control device for electron beam inspection / length measurement device, and electron beam inspection / length measurement device
PROBLEM TO BE SOLVED: To provide a method for controlling a beam diameter for an electron beam inspection/length measurement device, capable of promptly changing an electron beam diameter and electron beam current.SOLUTION: In a method for controlling an electron beam diameter for an electron beam inspection/length measurement device, an aperture plate 9 in which a plurality of apertures A, A, Aare formed with a size corresponding to a convergence half-value angle of an electron beam is provided in an optical path P of an electron beam EP, an electron beam emitted from an electron gun 1 is deflected by deflectors 11-14, and an aperture through which the electron beam passes is selected among the plurality of apertures.SELECTED DRAWING: Figure 2
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