Multilayer substrate having piezoelectric film, element having piezoelectric film, and method of manufacturing multilayer substrate having piezoelectric film

• 1. 用于制备具有多层膜的金属基板的方法、通过该方法获得的具有多层膜的金属基板、以及涂覆制品 [P] . 中国专利： CN101486027A . 2009-07-22
• 2. 压电膜的制造方法、基板和压电膜的层叠结构、压电激励器及其制造方法 [P] . 中国专利： CN100476033C . 2009.04.08
• 3. Multilayer substrate having piezoelectric film, element having piezoelectric film, and method of manufacturing multilayer substrate having piezoelectric film [P] . 日本专利： JP6342040B1 . 2018-06-13

  机译： 具有压电膜的多层基板，具有压电膜的元件以及具有压电膜的多层基板的制造方法

• 4. SUBSTRATE WITH THIN-FILM PIEZOELECTRIC MATERIAL, THIN-FILM PIEZOELECTRIC ELEMENT, THIN-FILM PIEZOELECTRIC DEVICE, AND METHOD OF MANUFACTURING SUBSTRATE WITH THIN-FILM PIEZOELECTRIC MATERIAL [P] . 日本专利： JP2010135669A . 2010-06-17

  机译： 具有薄膜压电材料的基材，薄膜压电元件，薄膜压电装置以及利用薄膜压电材料制造基材的方法

• 5. MULTILAYER SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM ELEMENT AND METHOD FOR MANUFACTURING SAME [P] . EP3364471B1 . 2021-07-14

  机译： 具有压电薄膜的多层基板，压电薄膜元件及其制造方法

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