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Determining the effect of stochastic behavior on overlay metric data

机译:确定随机行为对覆盖指标数据的影响

摘要

A method is provided for designing a metric target and estimating the uncertainty error of the metric index value with respect to stochastic noise, eg, that of line characteristics (eg, line edge roughness LER). The minimum required dimension of the target element can be derived by CDSEM (critical dimension scanning electron microscopy) or an optical system, with the corresponding target, by analysis of metrological uncertainty errors as well as line characteristics. The finding that reinforces the importance of this analysis is that the more localized models such as CPE (collectable per exposure) can be, the more probabilistic noise can be. Uncertainty error estimation results can be used for target design, overlay estimation enhancement, and metrology reliability assessment in multiple contexts.
机译:提供一种用于设计度量目标并估计度量指标值相对于随机噪声(例如,线特性(例如,线边缘粗糙度LER))的不确定性误差的方法。目标元素的最小所需尺寸可以通过CDSEM(临界尺寸扫描电子显微镜)或光学系统以及相应的目标,通过对计量不确定度误差和线路特性进行分析得出。增强该分析重要性的发现是,越本地化的模型(例如CPE(每次曝光可收集)),噪声的概率就越大。不确定性误差估计结果可用于目标设计,覆盖估计增强和在多种情况下的计量可靠性评估。

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