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DEGASSED FINE BUBBLE LIQUID GENERATING DEVICE, DEGASSED FINE BUBBLE LIQUID GENERATING METHOD, ULTRASONIC TREATMENT DEVICE AND ULTRASONIC TREATMENT METHOD
DEGASSED FINE BUBBLE LIQUID GENERATING DEVICE, DEGASSED FINE BUBBLE LIQUID GENERATING METHOD, ULTRASONIC TREATMENT DEVICE AND ULTRASONIC TREATMENT METHOD
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机译：脱盐细气泡液体产生装置，脱盐细气泡液体产生方法，超声波处理装置及超声波处理方法
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摘要
To provide a degassed fine bubble liquid generating device degassing a treatment liquid and generating fine bubbles in the treatment liquid by an easier method.SOLUTION: A degassed fine bubble liquid generating device generating a degassed fine bubble liquid which is a treatment liquid being supplied to a treatment portion held with the treatment liquid treating a prescribed treatment to a treating object, being degassed and containing fine bubbles comprises: a circulation path drawing out the treatment liquid from the treatment portion and supplying the generated degassed fine bubble liquid to the treatment portion; a first pump being disposed on the circulation path, drawing out the treatment liquid from the treatment portion and having a total head of 15 m or more; and a second pump being disposed at the drawing-out side of the treatment liquid from the first pump on the circulation path, being operated so as to carry the treatment liquid to a reverse direction to the first pump liquid and having a total head of (the total head of the first pump-15) m or more and the total head of the first pump or less.SELECTED DRAWING: Figure 1A
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