首页> 外国专利> FLATTERING LAYER FORMING DEVICE, FLATTERING LAYER MANUFACTURING METHOD, AND ARTICLE MANUFACTURING METHOD

FLATTERING LAYER FORMING DEVICE, FLATTERING LAYER MANUFACTURING METHOD, AND ARTICLE MANUFACTURING METHOD

机译:颤振层形成装置,颤振层制造方法以及制品制造方法

摘要

To provide a flattening layer forming device advantageous in terms of flattening accuracy and productivity.SOLUTION: Disclosed is a flattening layer forming device for forming a flattening layer with a flattening material on a substrate using a pressing member. The pressing member has a width wider than the substrate, and is provided in a form of a roll around which the pressing member is wound. The flattering layer forming device includes: a first spool and a second spool which are arranged opposite to each other so as to sandwich a substrate holding part in a plan view in a space on the substrate holding part; and a feeding part for winding the pressing member fed from the roll mounted on the first spoon by the second spool. The device brings the pressing member into contact with the flattering material on the substrate by reducing the tension of the pressing member between the first spool and the second spool and makes the pressing member separated from the flattening material by increasing the tension.SELECTED DRAWING: Figure 1
机译:提供一种在平坦化精度和生产率方面有利的平坦化层形成装置。解决方案:公开了一种平坦化层形成装置,该平坦化层形成装置用于使用加压构件在基板上形成具有平坦化材料的平坦化层。按压构件具有比基板宽的宽度,并且以辊的形式设置,按压构件缠绕在该辊上。平坦化层形成装置包括:第一线轴和第二线轴,它们彼此相对布置,以在平面图中将基板保持部夹在基板保持部上的空间中;送料部,用于通过第二卷轴卷绕从安装在第一汤匙上的辊送出的按压部件。该装置通过减小第一线轴和第二线轴之间的压力元件的张力,使压力元件与基板上的平坦材料接触,并通过增加张力使压力元件与平坦材料分离。 1个

著录项

  • 公开/公告号JP2020009899A

    专利类型

  • 公开/公告日2020-01-16

    原文格式PDF

  • 申请/专利权人 CANON INC;

    申请/专利号JP20180129461

  • 发明设计人 YOSHIDA TOMOHIKO;

    申请日2018-07-06

  • 分类号H01L21/027;B29C43/58;B29C43/18;

  • 国家 JP

  • 入库时间 2022-08-21 11:36:41

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