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MEASUREMENT SYSTEM AND METHOD FOR COMBINED CAPTURE OF THE SURFACE TOPOGRAPHY AND HYPERSPECTRAL IMAGING
MEASUREMENT SYSTEM AND METHOD FOR COMBINED CAPTURE OF THE SURFACE TOPOGRAPHY AND HYPERSPECTRAL IMAGING
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机译：表面层析成像和高光谱成像组合捕获的测量系统和方法
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摘要
The present invention relates, in particular, to a method and an apparatus for capturing topographic and spatially resolved, spectral properties of a surface to be examined. Here, the method comprises: producing an illumination pattern of a first measurement light with a multiplicity of wavelengths; imaging the illumination pattern of the first measurement light onto the surface to be examined by means of a chromatic objective in such a way that, by way of the chromatic objective, the illumination pattern is imaged in focus at different distances for different wavelengths of the multiplicity of wavelengths of the first measurement light; imaging the first measurement light radiated by the surface to be examined by means of the chromatic objective onto a confocal mask, which has a transmission pattern corresponding to the illumination pattern; spectrally splitting the first measurement light transmitted through the confocal mask; capturing a 2-dimensional intensity distribution of the spectrally split first measurement light with spatial resolution by means of the detector; ascertaining the topographic properties of the surface to be examined on the basis of the intensity distribution of the first measurement light captured by means of the detector; homogeneously illuminating the surface to be examined by means of a second measurement light with a multiplicity of wavelengths; imaging the second measurement light radiated by the surface to be examined by means of the chromatic objective onto the confocal mask; spectrally splitting the second measurement light transmitted through the confocal mask; capturing a 2-dimensional intensity distribution of the spectrally split second measurement light with spatial resolution by means of the detector; and ascertaining the spatially resolved, spectral properties of the surface to be examined on the basis of the intensity distribution of the second measurement light captured by means of the detector.
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