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COMPONENT MADE OF MICRO-MACHINABLE MATERIAL FOR RESONATOR WITH HIGH QUALITY FACTOR
COMPONENT MADE OF MICRO-MACHINABLE MATERIAL FOR RESONATOR WITH HIGH QUALITY FACTOR
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机译：高品质因数的谐振器微机械加工材料
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摘要
Component (1) of micro-machinable material of high-quality resonator (10) or of exhaust mechanism (20), with core (2) of micro-machinable material and / or covered with an oxide layer (3), and comprising, on said core (2) or on said oxide layer (3) an abrasion resistant layer (5) comprising a contact surface (6) cooperating with an antagonistic contact surface (7 ) and which is a self-assembled hydrophobic monolayer of the alkylsilane type and / or of the fluorinated or perfluorinated or polyperfluorinated type, of low or zero sulfur content, and arranged to repel any wetting product outside the contact zone between the contact surface (6) and the antagonistic contact surface (7).
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