首页> 外国专利> INTEGRATED LASER VOLTAGE PROBE PAD FOR MEASURING DC OR LOW FREQUENCY AC ELECTRICAL PARAMETERS WITH LASER BASED OPTICAL PROBING TECHNIQUES

INTEGRATED LASER VOLTAGE PROBE PAD FOR MEASURING DC OR LOW FREQUENCY AC ELECTRICAL PARAMETERS WITH LASER BASED OPTICAL PROBING TECHNIQUES

机译:集成激光电压探针垫,可使用基于激光的光学探针技术测量直流或低频交流电参数

摘要

A semiconductor or integrated circuit block (104) including a sense node (126) and a converter circuit (130), in which the sense node (126) develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit (130) converts the low frequency electrical parameter into an alternating electrical parameter having a frequency at or above the predetermined frequency level sufficient to modulate a laser beam (108) focused within a laser probe area (114) of the converter circuit (130). The converter (130) may include a ring oscillator, a switch circuit controlled by a clock enable signal, a capacitor having a charge rate based on the low frequency electrical parameter, etc. The laser probe area (114) has a frequency level based on a level of the low frequency electrical parameter to modulate the reflected laser beam (116) for measurement of the electrical parameter by a laser voltage probe test system (102).
机译:包括感测节点(126)和转换器电路(130)的半导体或集成电路块(104),其中感测节点(126)产生恒定的低频电参数或以低于预定频率的频率变化的低频电参数电平,并且转换器电路(130)将低频电参数转换为交流电参数,该交流电参数的频率等于或高于预定频率电平,足以调制聚焦在激光探针区域(114)内的激光束(108)转换器电路(130)的电路。转换器(130)可以包括环形振荡器,由时钟使能信号控制的开关电路,具有基于低频电参数的充电率的电容器等。激光探针区域(114)具有基于低频电参数的水平,以调制反射激光束(116),以通过激光电压探针测试系统(102)测量电参数。

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