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INTEGRATED LASER VOLTAGE PROBE PAD FOR MEASURING DC OR LOW FREQUENCY AC ELECTRICAL PARAMETERS WITH LASER BASED OPTICAL PROBING TECHNIQUES
INTEGRATED LASER VOLTAGE PROBE PAD FOR MEASURING DC OR LOW FREQUENCY AC ELECTRICAL PARAMETERS WITH LASER BASED OPTICAL PROBING TECHNIQUES
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机译:集成激光电压探针垫,可使用基于激光的光学探针技术测量直流或低频交流电参数
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摘要
A semiconductor or integrated circuit block (104) including a sense node (126) and a converter circuit (130), in which the sense node (126) develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit (130) converts the low frequency electrical parameter into an alternating electrical parameter having a frequency at or above the predetermined frequency level sufficient to modulate a laser beam (108) focused within a laser probe area (114) of the converter circuit (130). The converter (130) may include a ring oscillator, a switch circuit controlled by a clock enable signal, a capacitor having a charge rate based on the low frequency electrical parameter, etc. The laser probe area (114) has a frequency level based on a level of the low frequency electrical parameter to modulate the reflected laser beam (116) for measurement of the electrical parameter by a laser voltage probe test system (102).
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