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CHIP ASSEMBLY FOR MEASURING ELECTROCHEMICAL REACTION ON SOLID-LIQUID PHASE INTERFACE IN SITU
CHIP ASSEMBLY FOR MEASURING ELECTROCHEMICAL REACTION ON SOLID-LIQUID PHASE INTERFACE IN SITU
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机译：用于现场测量固相界面上电化学反应的芯片组件
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摘要
A chip assembly for measuring an electrochemical reaction on a solid-liquid phase interface in situ, comprising a first electrode (310), a second electrode (320), a first insulating film (510), a second insulating film (520), a third insulating film (530), a fourth insulating film (540) and an upper chip (100) and a lower chip (200) which are oppositely arranged and of which two sides are correspondingly combined in a sealing manner; a through hole (110) is provided on the upper chip (100); the first insulating film (510) under the through hole (110) is provided with the first electrode (310); a groove (210) opposite to the through hole (110) is provided on the lower chip (200); and the fourth insulating film (540) arranged at one side of the groove (210) is provided with the second electrode (320). The chip assembly dispenses with a specially-made sample rod, thereby substantially reducing test cost; and meanwhile, a lattice structure of a first electrode is also beneficial for observing topography change of a to-be-tested sample.
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