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WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM
WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM
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机译:扫描源光学相干断层成像系统的波长可调垂直腔发射激光
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摘要
A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) through the use of microelectromechanical systems (MEMS) technology is provided as a swept source for optical coherence tomography (OCT). The wavelength tunable VCSEL includes a bottom mirror of the VCSEL, an active area, and a MEMS tunable top mirror that is movable by electrostatic deflection. A bottom mirror comprising a GaAs-based distributed Bragg reflector (DBR) stack and an active region comprising multiple stacks of GaAs-based quantum dot (QD) layers are epitaxially grown on a GaAs substrate. The MEMS tunable top mirror includes a top mirror including a portion of the membrane supported by the suspension beams and a dielectric DBR stack. MEMS tunable quantum dots VCSELs can cover an operating wavelength range greater than 100 nm and can cover an operating wavelength range with a center wavelength preferably between 250 and 2950 nm and the sweeping rate is a number kHz to several hundred kHz, and up to a few MHz.
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