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WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM

机译:扫描源光学相干断层成像系统的波长可调垂直腔发射激光

摘要

A wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) through the use of microelectromechanical systems (MEMS) technology is provided as a swept source for optical coherence tomography (OCT). The wavelength tunable VCSEL includes a bottom mirror of the VCSEL, an active area, and a MEMS tunable top mirror that is movable by electrostatic deflection. A bottom mirror comprising a GaAs-based distributed Bragg reflector (DBR) stack and an active region comprising multiple stacks of GaAs-based quantum dot (QD) layers are epitaxially grown on a GaAs substrate. The MEMS tunable top mirror includes a top mirror including a portion of the membrane supported by the suspension beams and a dielectric DBR stack. MEMS tunable quantum dots VCSELs can cover an operating wavelength range greater than 100 nm and can cover an operating wavelength range with a center wavelength preferably between 250 and 2950 nm and the sweeping rate is a number kHz to several hundred kHz, and up to a few MHz.
机译:通过使用微机电系统(MEMS)技术,提供了一种波长可调的垂直腔面发射激光器(VCSEL),作为光学相干断层扫描(OCT)的扫频光源。波长可调VCSEL包括VCSEL的底部反射镜,有源区域和可通过静电偏转移动的MEMS可调顶部镜。在GaAs衬底上外延生长包括基于GaAs的分布式布拉格反射器(DBR)堆叠和包括多个堆叠的基于GaAs的量子点(QD)层的有源区的底部反射镜。 MEMS可调谐顶镜包括顶镜,该顶镜包括由悬架梁支撑的膜的一部分和电介质DBR堆叠。 MEMS可调量子点VCSEL可以覆盖大于100 nm的工作波长范围,并且可以覆盖中心波长最好在250至2950 nm之间的工作波长范围,并且扫描速率为数kHz到几百kHz,甚至高至几兆赫

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