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Mura quantifying system by Laser crystallization facility and Mura quantifying method by Laser crystallization facility
Mura quantifying system by Laser crystallization facility and Mura quantifying method by Laser crystallization facility
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机译：激光结晶设备的Mura定量系统和激光结晶设备的Mura定量方法
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摘要
The present invention relates to a mura quantification system and method, and more particularly, to a mura quantification system which is based on a laser crystallization apparatus including a laser crystallization apparatus, which comprises performing crystallization of a substrate by the laser crystallization apparatus, And a Mura quantification device is formed inside the laser crystallization facility so that the Mura quantification device can be quantified in real time. The Mura quantification method is based on the Mura quantification system and the laser crystallization facility due to the laser crystallization facility. Accordingly, the present invention is advantageous in that it is possible to quantitatively determine the amount of mud caused by the crystallized substrate in the facility including the laser crystallization apparatus, and to judge the state of the crystallized substrate in real time, thereby stably managing the process.
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