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CRUCIBLE HAVING STRUCTURE TO REINFORCE STRENGTH OF INSERTED CRUCIBLE AND COPING WITH THERMAL DEFORMATION, AND MANUFACTURING METHOD THEREOF
CRUCIBLE HAVING STRUCTURE TO REINFORCE STRENGTH OF INSERTED CRUCIBLE AND COPING WITH THERMAL DEFORMATION, AND MANUFACTURING METHOD THEREOF
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机译：坩埚具有增强插入的坩埚强度并应对热变形的结构及其制造方法
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摘要
The present invention relates to a crucible surrounded by a jig with one opened surface and a manufacturing method thereof. According to one embodiment of the present invention, the crucible surrounded by a jig with one opened surface comprises a heater structure included in a vacuum chamber and the crucible is included in the heater structure. The chamber is formed in a closed shape having a round cylindrical shape and capable of maintaining a vacuum state, and a heater insulation member is formed with a material of a substance not causing thermal deformation by repeated heating and cooling. The heater structure includes a heater therein and the heater is made of graphite, which is a material capable of generating heat by voltage application. In a shape of a top opening part of the crucible, an edge of a circumference is rounded as an outwardly opened horn shape, and the lower part of the top opening part is a cylinder with a flat curved surface and has a shape with a smooth circumferential surface not having a corrugation in a Z-axial direction. A metal, which is made of any one from Ta, W, and Mo capable of absorbing heat to provide good thermal conductivity and flexibility, is closely attached to the top opening part at the lower side of the horn-shaped top opening part. The metal closely attached to a horn part is formed on a rounded surface of the cylindrical member forming the lower surface of the horn part while having a shape with one torn side, thereby absorbing heat, which may cause thermal deformation in the crucible, to offset thermal stress while facilitating deformation.;COPYRIGHT KIPO 2019
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