SiO2 SiO2 .PRECURSOR FOR SiO2 THIN FILM DEPOSITION METHOD OF SiO2 THIN FILM USING THE SAME

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  机译： 金属有机沉积前驱体溶液合成和ter掺杂SiO2薄膜沉积

• 4. SYNTHESIS OF METAL ORGANIC DEPOSITION PRECURSOR SOLUTION AND TERBIUM-DOPED SiO2 THIN FILM DEPOSITION [P] . 日本专利： JP2008034840A . 2008-02-14

  机译： 金属有机沉积前体溶液的合成和掺OPE的SiO2薄膜沉积

• 5. SiO2 thin films produced by atomic layer deposition at room temperature [P] . 日本专利： JP2018525524A . 2018-09-06

  机译： 在室温下通过原子层沉积制备的SiO2薄膜

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