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Two-dimensional optical scanning mirror device, manufacturing method thereof, two-dimensional optical scanning device and image projection device

机译:二维光学扫描镜装置,其制造方法,二维光学扫描装置和图像投影装置

摘要

An object of the present invention is to simplify and miniaturize the structure of a mirror moving part in a two-dimensional optical scanning mirror device, a two-dimensional optical scanning device and an image projection device. A two-dimensional optical scanning mirror apparatus of the present invention is a two-dimensional optical scanning mirror apparatus comprising a movable mirror portion (10) supported on a substrate so as to be two-dimensionally scannable, a hard magnetic thin film Wherein a ratio of a magnetic field generated by the magnetic field generating device to a coercive force of the hard magnetic thin film is set to 0.2 Or less.
机译:本发明的目的是简化和小型化二维光学扫描镜装置,二维光学扫描装置和图像投影装置中的镜运动部件的结构。本发明的二维光学扫描镜装置是一种二维光学扫描镜装置,其包括以可二维扫描的方式支撑在基板上的可动镜部(10),硬磁薄膜。将由磁场产生装置产生的磁场对硬磁薄膜的矫顽力的比值设为0.2以下。

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