首页>
外国专利>
Seam during the super-atmospheric process in a diffusion-promoting atmosphere - healing method
Seam during the super-atmospheric process in a diffusion-promoting atmosphere - healing method
展开▼
机译:促进扩散的大气中超大气层过程中的煤层-愈合方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Aspects of the present disclosure include methods of treating a substrate to remove one or more of voids, seams, and grain boundaries from interconnects formed on the substrate. The method includes heating the substrate in a pressurized environment at super-atmospheric pressure. In one example, the substrate may be heated in a hydrogen-containing atmosphere.
展开▼