首页> 外国专利> Seam during the super-atmospheric process in a diffusion-promoting atmosphere - healing method

Seam during the super-atmospheric process in a diffusion-promoting atmosphere - healing method

机译:促进扩散的大气中超大气层过程中的煤层-愈合方法

摘要

Aspects of the present disclosure include methods of treating a substrate to remove one or more of voids, seams, and grain boundaries from interconnects formed on the substrate. The method includes heating the substrate in a pressurized environment at super-atmospheric pressure. In one example, the substrate may be heated in a hydrogen-containing atmosphere.
机译:本公开的方面包括处理衬底以从形成在衬底上的互连中去除空隙,接缝和晶粒边界中的一个或多个的方法。该方法包括在加压环境中以超大气压加热衬底。在一实例中,可在含氢气氛中加热衬底。

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