ADHESION STRENGTHENING TREATMENT APPARATUS AND ADHESION STRENGTHENING TREATMENT METHOD
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机译：附着力强化治疗装置及附着力强化治疗方法
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摘要
An adhesion strengthening treatment apparatus includes a chamber, a decompression section, an inactive gas supply section, and an adhesion strengthening gas supply section. The chamber forms a treatment space in which a substrate is housed. The decompression section reduces the pressure in the treatment space by discharging the gas from the treatment space. The inactive gas supply section supplies an inactive gas to the treatment space in a state where the gas is discharged by the decompression section, so that the pressure in the treatment space becomes a first value lower than the atmospheric pressure. After the inactive gas has been supplied to the treatment space by the inactive gas supply section, the adhesion strengthening gas supply section supplies an adhesion strengthening gas containing an adhesion strengthening agent to the treatment space in a state where the gas is discharged by the decompression section, so that the pressure in the treatment space becomes a second value lower than the atmospheric pressure.
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