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Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity

机译:研究对象的区域以便通过使用电子束和X射线辐射强度的测量来确定质量厚度及其组成的方法

摘要

A method for studying a zone of an object, the zone exhibiting a mass-thickness and comprising at least one chemical element, the method including a step of exposing a part of the zone of the object to an electron beam, a step of identifying each chemical element present in the said zone by virtue of the exposure step, a step of measuring, for each chemical element identified, a corresponding intensity of an X-ray radiation emergent from the object on account of the said exposure step, a step of determining a value of the said mass-thickness dependent on each measurement step, and a step of determining a value of the concentration of each chemical element identified using the said value of the mass-thickness determined.
机译:一种用于研究物体区域的方法,该区域表现出质量厚度并包括至少一种化学元素,该方法包括将物体的区域的一部分暴露于电子束的步骤,识别每个物体的步骤。通过所述暴露步骤存在于所述区域中的化学元素,该步骤针对所识别的每种化学元素,测量由于所述暴露步骤而从所述物体发出的X射线辐射的相应强度,该确定步骤所述质量厚度的值取决于每个测量步骤,以及确定使用所确定的质量厚度的所述值来确定所确定的每种化学元素的浓度的值的步骤。

著录项

  • 公开/公告号US10240918B2

    专利类型

  • 公开/公告日2019-03-26

    原文格式PDF

  • 申请/专利号US201514966932

  • 发明设计人 ERIC ROBIN;

    申请日2015-12-11

  • 分类号G01B15/02;G01N23/2252;H01J37/244;H01J37/285;

  • 国家 US

  • 入库时间 2022-08-21 12:12:25

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