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Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity
Method for studying a zone of an object so as to determine a mass-thickness and a composition thereof by using an electron beam and measurements of X-ray radiation intensity
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机译:研究对象的区域以便通过使用电子束和X射线辐射强度的测量来确定质量厚度及其组成的方法
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摘要
A method for studying a zone of an object, the zone exhibiting a mass-thickness and comprising at least one chemical element, the method including a step of exposing a part of the zone of the object to an electron beam, a step of identifying each chemical element present in the said zone by virtue of the exposure step, a step of measuring, for each chemical element identified, a corresponding intensity of an X-ray radiation emergent from the object on account of the said exposure step, a step of determining a value of the said mass-thickness dependent on each measurement step, and a step of determining a value of the concentration of each chemical element identified using the said value of the mass-thickness determined.
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