首页> 外国专利> F-theta photolithographic lenses

F-theta photolithographic lenses

机译:F-theta光刻镜头

摘要

An F-θ lens for laser engraving includes a first lens (L1), a second lens (L2), a third lens (L3), and a fourth lens (L4), which are coaxially arranged along a transmission direction of incident light; wherein the first lens (L1) is a meniscus lens, the second lens (L2) is a meniscus lens, the third lens (L3) is a plano-convex lens, and the fourth lens (L4) is a flat lens; wherein the first lens (L1) has a first surface (S1) and a second surface (S2), the second lens (L2) has a third surface (S3) and a fourth surface (S4), the third lens (L3) has a fifth surface (S5) and a sixth surface (S6), and the fourth lens (L4) has a seventh surface (S7) and an eighth surface (S8); the first surface (S1) to the eighth surface (S8) are sequentially arranged along the transmission direction of the incident light; wherein radii of curvature of the first surface (S1) to the eighth surface (S8) are −29 mm, −88 mm, −56 mm, −36 mm, ∞, −116 mm, ∞, and ∞, respectively; and center thicknesses (d1, d2, d3, d4) of the first lens (L1) to the fourth lens (L4) are 3 mm, 6 mm, 6 mm, and 3 mm, respectively.
机译:用于激光雕刻的F-θ透镜包括第一透镜(L 1 ),第二透镜(L 2 ),第三透镜​​(L 3 )和第四透镜(L 4 ),它们沿入射光的透射方向同轴排列;其中第一透镜(L 1 )是弯月形透镜,第二透镜(L 2 )是弯月形透镜,第三透镜​​(L 3 )是平凸透镜,第四透镜(L 4 )是平面透镜;其中第一透镜(L 1 )具有第一表面(S 1 )和第二表面(S 2 ),第二透镜( L 2 )具有第三表面(S 3 )和第四表面(S 4 ),第三透镜​​(L 3 具有第五表面(S 5 )和第六表面(S 6 ),以及第四透镜(L 4 )具有第七表面(S 7 )和第八表面(S 8 );第一表面(S 1 )至第八表面(S 8 )沿入射光的透射方向顺序排列。其中第一表面(S 1 )相对于第八表面(S 8 )的曲率半径为-29 mm,-88 mm,-56 mm,-36 mm ,∞,-116 mm,∞和∞;第一透镜(L)的中心厚度(d 1 ,d 2 ,d 3 ,d 4 1 )至第四透镜(L 4 )分别为3毫米,6毫米,6毫米和3毫米。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号