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Glow discharge system and glow discharge mass spectroscope using the same
Glow discharge system and glow discharge mass spectroscope using the same
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机译：辉光放电系统和使用该辉光放电系统的辉光放电质谱仪
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摘要
There is provided a glow discharge mass spectroscope having a higher analytical sensitivity by increasing an amount of extracted ion beams without a significant change in device construction and drive conditions of conventional glow discharge systems. When glow discharge is generated in a discharge region 27, an amount of ion beams extracted by a magnetic field formed by a first magnet 15 and a second magnet 26 is increased by disposing the circular and flat plate-shaped first magnet 15 between a flat plate-shaped solid sample 30 and a plunger 16 for holding the solid sample 30, disposing the ring-shaped second magnet 26 disposed coaxially with the first magnet 15 so as to surround a discharge region 27 at an ion extraction port side of a cell body 21 that forms the discharge region 27, and disposing the first magnet 15 and the second magnet 26 so that magnetization directions are parallel to each other in a direction toward the ion extraction port from the opening and magnetic poles are opposite to each other.
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