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Method and apparatus for infrared scattering scanning near-field optical microscopy with background suppression

机译:具有背景抑制的红外散射扫描近场光学显微镜的方法和装置

摘要

System and method for measuring an optical property of a sub micrometer region of a sample including interacting a probe tip of a probe microscope with a region of the sample, illuminating the sample with a beam of light from a radiation source such that light is scattered from the probe-sample interaction region, interfering a reference beam with the scattered light wherein the reference beam has an adjustable optical phase, measuring with a detector at least a portion of the light scattered from probe-sample and background regions at a substantially constant reference phase, and constructing a signal indicative of the optical property of the sample wherein contributions from background scattered light are substantially suppressed.
机译:用于测量样品的亚微米区域的光学特性的系统和方法,包括使探针显微镜的探针尖端与样品的区域相互作用,用来自辐射源的光束照射样品,以使光从探针-样品相互作用区域,用散射光干涉参考光束,其中参考光束具有可调节的光学相位,用检测器测量在基本恒定的参考相位下从探针-样品和背景区域散射的光的至少一部分,并构造一个表示样品光学特性的信号,其中来自背景散射光的贡献被大大抑制。

著录项

  • 公开/公告号US10228389B2

    专利类型

  • 公开/公告日2019-03-12

    原文格式PDF

  • 申请/专利权人 BRUKER NANO INC.;

    申请/专利号US201514957480

  • 发明设计人 CRAIG PRATER;HONGHUA YANG;

    申请日2015-12-02

  • 分类号G01Q30/02;G01Q20/02;G01Q60/06;

  • 国家 US

  • 入库时间 2022-08-21 12:14:38

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