HIGH-FREQUENCY IRRADIATION DEVICE, HIGH-FREQUENCY IRRADIATION SYSTEM, AND HIGH-FREQUENCY IRRADIATION METHOD
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机译:高频辐照装置,高频辐照系统和高频辐照方法
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摘要
PROBLEM TO BE SOLVED: To provide a high-frequency irradiation device, a high-frequency irradiation system and a high-frequency irradiation method, in which heating of an object to be heated can be efficiently performed even when physical property change of the object to be heated due to heating occurs.SOLUTION: In a high frequency irradiation device, the input power inputted when output of an oscillator (2) generating a high frequency is detected, output frequency of the oscillator (2) is controlled in accordance with the detection result, the frequency variation amount per unit time of the output frequency of the controlled oscillator (2) is detected, and output phase of the oscillator (2) is controlled in accordance with the detection result.SELECTED DRAWING: Figure 1
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