The method for calculating project amount is tempered, with the device and portable device for calculating project amount

• 1. 一种基于雷达点云采剥工程量计算方法、装置、服务器 [P] . 中国专利： CN112634348A . 2021-04-09
• 2. 一种待装修空间的工程量计算方法及装置 [P] . 中国专利： CN111985038A . 2020-11-24
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  机译： 投影光学系统成像特性中的波动量计算方法，曝光装置及装置的制造方法

• 4. Method of calculating amount of fluctuation of imaging characteristic of projection optical system, exposure apparatus, and method of fabricating device [P] . 美国专利： US9116444B2 . 2015-08-25

  机译： 投影光学系统的成像特性的波动量的计算方法，曝光装置以及制造装置的方法

• 5. METHOD OF CALCULATING AMOUNT OF FLUCTUATION OF IMAGING CHARACTERISTIC OF PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND METHOD OF FABRICATING DEVICE [P] . 美国专利： US2014233007A1 . 2014-08-21

  机译： 投影光学系统，曝光装置的成像特性的波动量的计算方法以及制造装置的方法

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